Type-C
Type-C
- MCi, MCe, MCo 2022.4.5 MCo feedthroughs replaced.
- Resistance of actuator coil [Ω]
| IMCi | IMCo | IMCe |
H1 | 2.98 | 4.41 | 2.74 |
H2 | 3.96 | 4.45 | 2.64 |
H3 | 2.23 | 5.49 | 2.37 |
H4 | 2.40 | 4.52 | 2.59 |
- Inductance of actuator coil [μH]
| IMCi | IMCo | IMCe |
H1 | 34.8 | 38.7 | 38.3 |
H2 | 36.9 | 37.1 | 38.1 |
H3 | 36.6 | 37.0 | 38.5 |
H4 | 37.8 | 39.0 | 38.4 |
- IMMT1, IMMT2 2022.4.8 IMMT2 feedthroughs replaced.
- Feedthrough flange position of chamber
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- Port position on the feedthrough flange
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- Connector position on the feedthrough flange
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| Pin assign | IMMT1 | IMMT2 |
COIL | 1-6: H1 2-7: H2 3-8: H3 4-9: H4 | 3.62 Ω 19.6 uH 4.73 Ω 36.9 uH 3.9 Ω 32.2 uH 5.57 Ω 32.7 uH | 4.73 Ω 23 uH 4.41 Ω 20.7 uH 3.7 Ω 19 uH 4.74 Ω 34 uH |
PICO Motor AC Resistance [Ω] @1kHz | 1-6: 2-7: 3-8: 4-9: | 20.4 Ω 21.1 Ω 26.6 Ω 22.6 Ω | 23.5 Ω 20.3 Ω 20.6 Ω 21.9 Ω |
3. OMMT1, OSTM
- Feedthrough flange position of chamber
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- Port position on the feedthrough flange
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- Connector position on the feedthrough flange
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| Pin assign | OMMT1 | OMMT2 | OSTM |
OSEM H1 | 1-6: PD 2-7: LED 3-8: COIL 4-9: blank | 0.71 V 1.2 V 16 Ω 3.26 mH NC | 0.71 V 1.18 V 15.9 Ω 3.29 mH NC | 0.71 V 1.18 V 16.2 Ω 3.22 mH NC |
OSEM H2 | 1-6: PD 2-7: LED 3-8: COIL 4-9: blank | 0.71 V 1.16 V 16.1 Ω 3.27 mH NC | 0.71 V 1.18 V 15.9 Ω 3.27 mH NC | 0.71 V 1.17 V 16 Ω 3.22 mH NC |
OSEM H3 | 1-6: PD 2-7: LED 3-8: COIL 4-9: blank | 0.71 V 1.18 V 16 Ω 3.26 mH NC | 0.71 V 1.18 V 16.1 Ω 3.24 mH NC | 0.71 V 1.18 V 16.1 Ω 3.2 mH NC |
OSEM H4 | 1-6: PD 2-7: LED 3-8: COIL 4-9: blank | 0.71 V 1.18 V 18.7 Ω 3.25 mH NC | 0.71 V 1.2 V 15.9 Ω 3.26 mH NC | 0.71 V 1.17 V 15.9 Ω 3.21 mH NC |
PICO Motor AC Resistance [Ω] @1kHz | 1-6: 2-7: 3-8: 4-9: | 18.4 Ω 20.8 Ω 19.5 Ω 19.1 Ω | 19.1 Ω 19.6 Ω 21.3 Ω 19.2 Ω | 17.4 Ω 18.2 Ω 18.9 Ω 19.1 Ω |