​​Type-C
​​Type-C
​​
  1. ​​MCi, MCe, MCo　2022.4.5 MCo feedthroughs replaced.
  • ​​Resistance of actuator coil [Ω]
​​
​​
​​IMCi
​​IMCo
​​IMCe
​​H1
​​2.98
​​4.41
​​2.74
​​H2
​​3.96
​​4.45
​​2.64
​​H3
​​2.23
​​5.49
​​2.37
​​H4
​​2.40
​​4.52
​​2.59
  • ​​Inductance of actuator coil [μH]
​​
​​
​​IMCi
​​IMCo
​​IMCe
​​H1
​​34.8
​​38.7
​​38.3
​​H2
​​36.9
​​37.1
​​38.1
​​H3
​​36.6
​​37.0
​​38.5
​​H4
​​37.8
​​39.0
​​38.4
​​
​​
  1. ​​IMMT1, IMMT2  2022.4.8 IMMT2 feedthroughs replaced.
​​
  • ​​Feedthrough flange position of chamber
​​
 
User-uploaded image: IMM+feedthrough.jpg
​​
​​
​​
  • ​​Port position on the feedthrough flange
​​
 
User-uploaded image: Feedthrough.png
​​
​​
  • ​​Connector position on the feedthrough flange
​​
 
User-uploaded image: IFIIMM+connector.png
​​
​​
​​
​​
​​Pin assign
​​IMMT1
​​IMMT2
​​COIL
​​1-6:  
​​H1
​​
​​2-7:
​​H2
​​
​​3-8:
​​H3
​​
​​4-9: 
​​H4
​​3.62 Ω
​​19.6 uH
​​
​​4.73 Ω
​​36.9 uH
​​
​​3.9 Ω
​​32.2 uH
​​
​​5.57 Ω
​​32.7 uH
​​4.73 Ω
​​23 uH
​​
​​4.41 Ω
​​20.7 uH
​​
​​3.7 Ω
​​19 uH
​​
​​4.74 Ω
​​34 uH
​​PICO Motor
​​
​​AC Resistance [Ω]  @1kHz
​​1-6:  
​​
​​
​​2-7: 
​​
​​
​​3-8: 
​​
​​20.4 Ω
​​
​​
​​21.1 Ω
​​
​​
​​26.6 Ω
​​
​​23.5 Ω
​​
​​
​​20.3 Ω
​​
​​
​​20.6 Ω
​​