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Type-A

Feedthrough flange position of chamber

Port position on the feedthrough flange

Note: Geophone (Port No.7-5 to 7-8) is checked by actually acquiring the measurement data. They are not included in the cable check table below.

Port No.	Pin assign	IXV	EXV	IYV	EYV
1-1 BF DPCH EXV: Replace with　Port5-8 EXV: Swapped Pin2-7 and Pin 4-9 in vacuum	1-6: H1 2-7: H2 3-8: H3 4-9:	25.3 Ω 1.067 mH 26.3 Ω 1.066 mH 25.5 Ω 1.063 mH NC	23.2 Ω 1.062 mH 23.8 Ω 1.063 mH 22.6 Ω 1.06 mH NC	25.5 Ω 1.066 mH 26.2 Ω 1.066 mH 25.6 Ω 1.068 mH NC	27.8 Ω 1.069 mH 25.5 Ω 1.064 mH 26.0 Ω 1.057 mH NC
1-1	Ground fault	None	between Pin4 and 5: 3.3Ω	None	None
1-2 BF DPCV	1-6: V1 2-7: V2 3-8: V3 4-9:	25.3 Ω 1.062 mH 24.5 Ω 1.061 mH 24.4 Ω 1.062 mH NC	26.4 Ω 1.065 mH 24.7 Ω 1.061 mH 25.9 Ω 1.060 mH NC	26.2 Ω 1.062 mH 24.9 Ω 1.067 mH 24.3 Ω 1.061mH NC	24.9 Ω 1.064 mH 25.7 Ω 1.064 mH 25.3 Ω 1.059 mH NC
1-3 BF DSCH	1-6: H1 2-7: H2 3-8: H3 4-9:	24.5 Ω 8.56 mH 24.6 Ω 8.55 mH 23.6 Ω 8.55 mH NC	24.6 Ω 8.57 mH 24.5 Ω 8.56 mH 24.7 Ω 8.55 mH NC	24.5 Ω 8.56 mH 24.3 Ω 8.53 mH 23.6 Ω 8.56 mH NC	25.7 Ω 8.57 mH 26.4 Ω 8.61 mH 24.7 Ω 8.56 mH NC
1-3	Ground fault	None	None	None	None
1-4	1-6:	24.3 Ω	24.8 Ω	24.2 Ω	25.3 Ω